HIROX Height Measurements

The height measurement of the Z stage or XY stage is controlled through AUX port and the driver controller CT-7. This extended port allows for the implementation of future additional measurement capabilities and automation features.

The fine Z-axis (ST-HZ) stage controlled by CT-7 can measure the height of your sample. The controller detects the height difference digitally, and the KH-3000 converts it to the actual distance. All you have to do is focus on the two areas of interest and the Z-distance between them is automatically readsout.

By irradiating a laser slit from a diagnal angle of 45 degrees, the height can be obtained by measuring the distance of a slit.

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